規格

掃描階段

掃瞄階段

110 mm x 110 mm x 110 mm

最小步長

20 nm

定位

Closed loop positioning, linear, zero hysteresis encoder with direct real-time readout of displacement in x, y, z

線性位置解析度

20 nm

最大掃描速度

10 mm/s

測量解析度

32-bit decoder @ up to 40 MHz

尺吋

500 mm (H) x 400 mm (W) x 675 mm (D)

SVP Electronics

信號鏈

Phase-sensitive detection using microprocessor-controlled lock-in amplifier with a digital dual-phase oscillator and differential electrometer input.

鎖定放大器

Software controllable gain range (1 –10^5)

Output time constant: 0.1, 1, 10 s

差分靜電計

10^15 Ω input impedance

十年增益範圍

0 to 80 dB

共模範圍

±12 V

振動執行器

One dimensional low voltage piezo-electric actuator

振幅

Software set from 1 – 30 μm

電化學靈敏度

Better than 5 μA/cm²
(using standard PIS test approach)

可用的實驗

Line Scan, Area Scan